Optical MEMS for telecoms
نویسنده
چکیده
MEMS are finding an increasing number of applications in sensors, devices, and actuators1,2. MEMS are being applied to a wide range of systems. Progress is dramatic, especially in optical telecommunications3. These applications may be divided roughly into two classes: i) those requiring precise features for optical alignment, and ii) those involving the small moving optical parts necessary for more advanced functionality.
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